I have to deploy a C# application on a 64 bit machine though there is a slight probability that it could also be deployed on a 32 bit machine. Should I build two separate executables targeting x86 and x64 platform or should I go for a single executable built targeting 'AnyCPU' platform (specified in the project property's Build option'. Would there be any performace difference between a C# assembly built targeting 'AnyCPU' is deployed on a 64 bit machine vs the same assembly built targeting specifically 'x64' platform ?
No, there is no difference in performance between AnyCPU application running on a 64-bit Windows and an x64 application running on it. The only thing that flag changes are some flags in the header of the compiled assembly and the CLR uses it only to decide whether to use x86 or x64, nothing else
If you were asking whether there is a difference between x86 application running on a 64-bit Windows and an x64 (or AnyCPU), then the answer would be yes. The differences between the two are:
tail.
instruction (which for example C# never does)